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[Labor Accident Case] Poisoning during maintenance work on semiconductor manufacturing equipment.

Introducing a case of poisoning that occurred during maintenance work on semiconductor manufacturing equipment.

After a meeting regarding the baking and oxidation work conducted by the semiconductor manufacturer for maintenance, harmful substances were detected using a detection tube while measuring the residual harmful substances in the semiconductor manufacturing equipment. During this process, the harmful substances leaked, and the individual was affected while passing by the equipment. The affected person, after resting in the office for about an hour due to feeling unwell, received a consultation from the manufacturer's industrial physician. Following the industrial physician's instructions, they went to a university hospital for further examination, where they were diagnosed with acute drug poisoning and required a four-day hospitalization. 【Suggestion】 ■ It is recommended to use gas monitors to check environmental concentrations before work, confirm leakage during work, and verify restoration to original conditions after work. *For more details, please refer to the PDF document or feel free to contact us.

  • Measurement and Inspection

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